TECH – China has officially unveiled its first domestically developed commercial electron beam lithography (EBL) machine, named “Xizhi”, marking a major breakthrough in high-precision chipmaking. Developed by Zhejiang University’s Yuhang Quantum Research Institute, it achieves 0.6-nanometer accuracy and 8-nanometer line widths—performance matching that of mainstream international EBL systems.
Unlike traditional photolithography tools that depend on costly masks and ultraviolet light, Xizhi employs a focused electron beam to directly “write” circuit patterns onto silicon wafers. This approach enables real-time design modifications—ideal for iterative debugging during early phases of semiconductor and quantum chip research. As a research team member described, Xizhi is like a “nano-pen” capable of engraving the blueprint of a city onto a single strand of hair.
Xizhi’s development addresses a long-standing barrier in China’s semiconductor ambitions: until now, export restrictions prevented key institutions—including USTC and Zhejiang Lab—from accessing advanced lithography systems. With Xizhi entering application testing, Chinese researchers now have an indigenous high-precision tool to spearhead next-generation chip innovation.
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This achievement has far-reaching implications. It lays a domestic foundation for semiconductor R&D and quantum chip development, reducing reliance on foreign imports and accelerating China’s technological self-reliance. Market analysts also anticipate that Xizhi’s availability will stimulate investment across the Chinese lithography supply chain—and may present opportunities for investors.
However, it’s important to note that while EBL systems like Xizhi offer unmatched precision and flexibility, they lag behind DUV and EUV lithography in terms of throughput—making them less suitable for mass chip production. Consequently, Xizhi is expected to serve primarily in R&D and prototyping contexts. Named after the famed calligrapher Wang Xizhi, the machine’s designation reflects a blend of technological craftsmanship and artistic precision.
This domestic milestone underscores China’s strategic push to overcome export embargoes and lay critical groundwork for advanced chipmaking. While Xizhi may not replace high-volume lithography tools, its capability and homegrown origin mark a pivotal step toward innovation autonomy.
